Application Area
Cleaning of non-optical parts, assemblies, and components for EUV applications – suitable for cleanroom and vacuum environments, as well as for use outside of vacuum conditions.
Initial Situation
In the optics, laser, and semiconductor industries, the demand for technical cleanliness continues to rise. The goal is to reliably remove even the smallest traces of contamination. The challenge was to clean components according to three defined cleanliness levels:
- Grade 3: Components used in cleanroom environments outside the vacuum
- Grade 2: Parts used in cleanroom and vacuum applications
- Grade 1: Highest standards for non-optical components integrated into EUV optics modules
All levels require minimal contamination from particles, organic residues, or chemical elements – a critical factor for the performance of sensitive manufacturing systems.
Solution
MAFAC MALTA, along with its system technologies and peripheral equipment, offers a practical and efficient solution:
- Cleaning is performed directly in the cleanroom to prevent recontamination
- Precise control of all process parameters to ensure removal of unwanted residues
- Process validation through XPS analysis (X-ray Photoelectron Spectroscopy)
Results
- All specified cleanliness requirements were reliably met
- The cleaning system proved to be fully compatible with existing production workflows
- No complex custom adaptations or development cycles were necessary
- Compliance with technical specifications was verified through validated measurements
- The solution delivered both process reliability and economic efficiency
Customer Experience
A leading manufacturer in the optics, laser, and semiconductor industry successfully integrated the cleaning performance of a standardized MAFAC system into their existing processes. By combining proven technology, tailored parameters, and cleanroom-capable handling, even the strictest EUV requirements were reliably fulfilled.
Note
The grade categories (1–3) are used for simplified illustration of cleanliness levels. They reflect practical, industry-based standards but are not official or formal norms.